Chanro Park: search on Z-Library

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1

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Extreme Ultraviolet (EUV) Lithography V - E-beam inspection of EUV mask defects: To etch or not to etch?

Wood, Obert R., Panning, Eric M., Bonam, Ravi, Tien, Hung-Yu, Park, Chanro, Halle, Scott, Wang, Fei, Corliss, Daniel, Fang, Wei, Jau, Jack

Year:

2014

Language:

english

File:

PDF, 731 KB

english, 2014

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Fabrication of 28nm pitch Si fins with DSA lithography

Schmid, Gerard, Tong, William M., Resnick, Douglas J., Farrell, Richard, Xu, Ji, Park, Chanro, Preil, Moshe, Chakrapani, Vidhya, Mohanty, Nihar, Ko, Akiteru, Cicoria, Michael, Hetzer, David, Somervell

Year:

2013

Language:

english

File:

PDF, 1.13 MB

english, 2013

3

Degradation of Ferroelectric Capacitors during Metal Etching and Ashing Processes

Park, Chanro, Kwon, O Sung, Seol, Yeo Song, Kim, Jin Woong, Yoon, Hee Koo

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 2.62 MB

english, 2000

4

[IEEE 2018 IEEE Nanotechnology Symposium (ANTS) - Albany, NY, USA (2018.11.14-2018.11.15)] 2018 IEEE Nanotechnology Symposium (ANTS) - Plasma treatment effect on gate stack electrical properties

Li, Tao, Park, Chanro, Bao, Ruqiang, Watanabe, Koji

Year:

2018

Language:

english

File:

PDF, 7 KB

english, 2018

5

Thermal stability of RuO2/Ru bilayer thin film in oxygen atmosphere

Sang Ho Oh, Chan Gyung Park, Chanro Park Park

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 1.26 MB

english, 2000

6

Structural stability of low temperature grown InGaAs/GaAs heterostructure

Chanro Park, C. G. Park, Chae-Deok Lee, S. K. Noh

Journal:

Journal of Electronic Materials

Year:

1997

Language:

english

File:

PDF, 1.01 MB

english, 1997

7

[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2010.06.15-2010.06.17)] 2010 Symposium on VLSI Technology - Si tunnel transistors with a novel silicided source and 46mV/dec swing

Jeon, Kanghoon, Loh, Wei-Yip, Patel, Pratik, Kang, Chang Yong, Oh, Jungwoo, Bowonder, Anupama, Park, Chanro, Park, C. S., Smith, Casey, Majhi, Prashant, Tseng, Hsing-Huang, Jammy, Raj, Liu, Tsu-Jae Ki

Year:

2010

Language:

english

File:

PDF, 471 KB

english, 2010

8

Leakage current behaviors of acceptor- and donor-doped (Ba[sub 0.5]Sr[sub 0.5])TiO[sub 3] thin films

Kim, Sang Sub, Park, Chanro

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 255 KB

english, 1999

9

Novel Capacitorless Single-Transistor Charge-Trap DRAM (1T CT DRAM) Utilizing Electrons

M. G. Ertosun, Kwan-yong Lim, Chanro Park, Jungwoo Oh, P. Kirsch, K. C. Saraswat

Journal:

IEEE Electron Device Letters

Year:

2010

Language:

english

File:

PDF, 177 KB

english, 2010

10

Substrate Hybridization and Rippling of Graphene Evidenced by Near-Edge X-ray Absorption Fine Structure Spectroscopy

Lee, Vincent, Park, Chanro, Jaye, Cherno, Fischer, Daniel A., Yu, Qingkai, Wu, Wei, Liu, Zhihong, Bao, Jiming, Pei, Shin-Shem, Smith, Casey, Lysaght, Patrick, Banerjee, Sarbajit

Journal:

The Journal of Physical Chemistry Letters

Year:

2010

Language:

english

File:

PDF, 1.61 MB

english, 2010

11

[American Vacuum Soc 1999 4th International Symposium on Plasma Process-Induced Damage - Monterey, CA, USA (9-11 May 1999)] 1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) - Control of performance degradation induced by contact etching for a ferroelectric capacitor using a pulsed-power inductively coupled plasma

O Sung Kwon,, Chang Ju Choi,, Chanro Park,, Yeo Song Seol,, Il Hyun Choi,

Year:

1999

Language:

english

File:

PDF, 284 KB

english, 1999

12

Influence of reference layer stability on the switching performance of sub-micron-sized magnetic tunnel junctions

Klostermann, Ulrich, Park, Chanro, Raberg, Wolfgang, Dahmani, Faiz, Ruehrig, Manfred

Journal:

Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 389 KB

english, 2006

13

Formation of self-assembled GaAs/AlGaAs quantum dots by low-temperature epitaxy

Lee, Chae-Deok, Park, Chanro, Lee, Hwack Joo, Noh, S. K., Lee, Kyu-Seok, Park, Seong-Ju

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 441 KB

english, 1998

14

[IEEE 2009 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) - Hsinchu, Taiwan (2009.04.27-2009.04.29)] 2009 International Symposium on VLSI Technology, Systems, and Applications - Band engineered tunnel oxides for improved TANOS-type flash program/erase with good retention and 100K cycle endurance

Gilmer, David C., Goel, Niti, Verma, Sarves, Park, Hokyung, Park, Chanro, Bersuker, Gennadi, Kirsch, Paul D., Saraswat, Krishna C., Jammy, Raj

Year:

2009

Language:

english

File:

PDF, 292 KB

english, 2009

15

Performance and reliability improvement of HfSiON gate dielectrics using chlorine plasma treatment

Park, Hong Bae, Ju, Byongsun, Kang, Chang Yong, Park, Chanro, Park, Chang Seo, Lee, Byoung Hun, Kim, Tea Wan, Kim, Beom Seok, Choi, Rino

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 439 KB

english, 2009

16

[IEEE ESSDERC 2010 - 40th European Solid State Device Research Conference - Sevilla, Spain (2010.09.14-2010.09.16)] 2010 Proceedings of the European Solid State Device Research Conference - Sub-60nm Si tunnel field effect transistors with Ion >100 µA/µm

Loh, Wei-Yip, Jeon, Kanghoon, Kang, Chang Yong, Oh, Jungwoo, Patel, Pratik, Smith, Casey, Barnett, Joel, Park, Chanro, King Liu, Tsu-Jae, Tseng, Hsing-Huang, Majhi, Prashant, Jammy, Raj, Hu, Chenming

Year:

2010

Language:

english

File:

PDF, 840 KB

english, 2010

17

Fabrication of Self-Assembled GaAs/AlGaAs Quantum Dots by Low-Temperature Droplet Epitaxy

Lee, Chae-Deok, Park, Chanro, Lee, Hwack Joo, Lee, Kyu-Seok, Park, Seong-Ju, Park, Chan Gyung, Noh, Sam Kyu, Koguchi, andNobuyuki

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 876 KB

1998

18

ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - CMOS Scaling with III-V Channels for Improved Performance and Low Power

Hill, Richard J., Oh, Jungwoo, Park, Chanro, Barnett, J., Price, Jimmy, Huang, Jeff, Goel, Niti, Loh, W. Y., Kirsch, Paul, Majhi, Prashant, Jammy, Raj

Year:

2011

Language:

english

File:

PDF, 1.12 MB

english, 2011

19

Dry Etching of PZT Films with CF4/Ar High Density Plasma

Park, Chanro, Cho, Jun Hee, Choi, Chang Ju, Seol, Yeo Song, Choi, Il Hyun

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 1.18 MB

english, 1998

20

Plasma Etching Damage to Ferroelectric SrBi2Ta2O9 (SBT) Thin Films and Capacitors

Cho, Jun Hee, Kwon, Il Young, Park, Chanro, Choi, Chang Ju, Seol, Yeo Song, Pyun, D. S., Choi, Il Hyun

Journal:

MRS Proceedings

Year:

1999

Language:

english

File:

PDF, 1.11 MB

english, 1999

21

[IEEE 2017 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2017.12.2-2017.12.6)] 2017 IEEE International Electron Devices Meeting (IEDM) - Integrated dual SPE processes with low contact resistivity for future CMOS technologies

Wu, Heng, Seo, Soon-Cheon, Niu, Chengyu, Wang, Wei, Tsutsui, Gen, Gluschenkov, Oleg, Liu, Zuoguang, Petrescu, Alexandru, Carr, Adra, Choi, Sam, Tsai, Stan, Park, Chanro, Seshadri, Indira, Desilva, Anu

Year:

2017

Language:

english

File:

PDF, 740 KB

english, 2017

22

Pinch-Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation

Nguyen, Son van, Haigh, Thomas J, Cheng, Kangguo, Penny, C., Park, Chanro, Li, J., Mehta, Sanjay C, Yamashita, Tenko, Jiang, Liying, Canaperi, Don

Journal:

ECS Transactions

Year:

2018

Language:

english

File:

PDF, 797 KB

english, 2018

23

[IEEE 2020 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2020.6.16-2020.6.19)] 2020 IEEE Symposium on VLSI Technology - Improved Air Spacer Co-Integrated with Self-Aligned Contact (SAC) and Contact Over Active Gate (COAG) for Highly Scaled CMOS Technology

Cheng, Kangguo, Park, Chanro, Wu, Heng, Li, Juntao, Nguyen, Son, Zhang, Jingyun, Wang, Miaomiao, Mehta, Sanjay, Liu, Zuoguang, Conti, Richard, Loubet, Nicolas, Frougier, Julien, Greene, Andrew, Yamash

Year:

2020

File:

PDF, 1.61 MB

2020